메뉴 건너뛰기




Volumn 12, Issue 4, 2006, Pages 365-368

CVD-diamond-based thermocouple for high sensitive temperature measurements

Author keywords

p type CVD diamond; Seebeck effect; Temperature measurement

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTRIC RESISTANCE; THERMOCOUPLES;

EID: 33644547380     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0066-y     Document Type: Article
Times cited : (14)

References (21)
  • 1
    • 0035449304 scopus 로고    scopus 로고
    • Analysis of piezoresistive properties of CVD-diamond films on silicon
    • Adamschik M et al (2001) Analysis of piezoresistive properties of CVD-diamond films on silicon. Diam Rel Mat 10:1670-1675
    • (2001) Diam Rel Mat , vol.10 , pp. 1670-1675
    • Adamschik, M.1
  • 2
    • 0242555641 scopus 로고
    • Piezoresistivity in vapor-deposited diamond films
    • Aslam M et al (1992) Piezoresistivity in vapor-deposited diamond films. Appl Phys Lett 60:2923-2925
    • (1992) Appl Phys Lett , vol.60 , pp. 2923-2925
    • Aslam, M.1
  • 4
    • 0000552647 scopus 로고    scopus 로고
    • Thermopower investigation of n- And p-type GaN
    • Brandt MS et al (1998) Thermopower investigation of n- and p-type GaN. Phys Rev B 58:7786-7791
    • (1998) Phys Rev B , vol.58 , pp. 7786-7791
    • Brandt, M.S.1
  • 5
    • 0037341538 scopus 로고    scopus 로고
    • Physical properties of diamond for thermistors and pressure transducers
    • Chalker PR et al (2003) Physical properties of diamond for thermistors and pressure transducers. Semicond Sci Technol 18:S113-S116
    • (2003) Semicond Sci Technol , vol.18
    • Chalker, P.R.1
  • 6
    • 0003071863 scopus 로고    scopus 로고
    • Polycrystalline diamond pressure micro-sensor
    • Davidson JL et al (1996) Polycrystalline diamond pressure micro-sensor. Diam Rel Mat 51:86-92
    • (1996) Diam Rel Mat , vol.51 , pp. 86-92
    • Davidson, J.L.1
  • 7
    • 0001146059 scopus 로고    scopus 로고
    • Piezoresistive property of CVD diamond films
    • Deguchi M et al (1997) Piezoresistive property of CVD diamond films. Diam Rel Mat 2-4:367-373
    • (1997) Diam Rel Mat , vol.2-4 , pp. 367-373
    • Deguchi, M.1
  • 8
    • 0003895809 scopus 로고    scopus 로고
    • Thermopower in the hopping conductivity region: Transition from Mott's to Zvyagin's formula
    • Demishev SV et al (1998) Thermopower in the hopping conductivity region: transition from Mott's to Zvyagin's formula. JETP Lett 68:842-847
    • (1998) JETP Lett , vol.68 , pp. 842-847
    • Demishev, S.V.1
  • 9
    • 0042904331 scopus 로고    scopus 로고
    • Sensors and smart electronics in harsh environment applications
    • Fahrner WL et al (2001) Sensors and smart electronics in harsh environment applications. Microsyst Technol 7:138-144
    • (2001) Microsyst Technol , vol.7 , pp. 138-144
    • Fahrner, W.L.1
  • 10
    • 0030257118 scopus 로고    scopus 로고
    • A novel oxygen gas sensor utilizing thin film diamond diode with catalysed tin oxide electrode
    • Gurbuz Y et al (1996) A novel oxygen gas sensor utilizing thin film diamond diode with catalysed tin oxide electrode. Sensor Actuat B Chem 35-36:303-307
    • (1996) Sensor Actuat B Chem , vol.35-36 , pp. 303-307
    • Gurbuz, Y.1
  • 11
    • 0038257777 scopus 로고    scopus 로고
    • High-temperature tolerant diamond diode for carbon monoxide gas detection
    • Gurbuz Y et al (1998) High-temperature tolerant diamond diode for carbon monoxide gas detection. J Appl Phys 84:6935-6936
    • (1998) J Appl Phys , vol.84 , pp. 6935-6936
    • Gurbuz, Y.1
  • 12
    • 2342475757 scopus 로고    scopus 로고
    • Diamond microelectronic gas sensor for detection of benzene and toluene
    • Gurbuz Y et al (2004) Diamond microelectronic gas sensor for detection of benzene and toluene. Sensor Actuat B Chem 99:207-215
    • (2004) Sensor Actuat B Chem , vol.99 , pp. 207-215
    • Gurbuz, Y.1
  • 13
    • 0034311520 scopus 로고    scopus 로고
    • Semiconducting diamond as material for high temperature thermistors
    • Klugmann E, Polowczyk M (2000) Semiconducting diamond as material for high temperature thermistors. Mater Res Innovation 4;45-48
    • (2000) Mater Res Innovation , vol.4 , pp. 45-48
    • Klugmann, E.1    Polowczyk, M.2
  • 14
    • 0032622261 scopus 로고    scopus 로고
    • Diamond MEMS - A new emerging technology
    • Kohn E et al (1999) Diamond MEMS - a new emerging technology. Diam Rel Mater 8:934-940
    • (1999) Diam Rel Mater , vol.8 , pp. 934-940
    • Kohn, E.1
  • 15
    • 0032655851 scopus 로고    scopus 로고
    • A large range of boron doping with low compensation ratio for homoepitaxial diamond films
    • Lagrange JP et al (1999) A large range of boron doping with low compensation ratio for homoepitaxial diamond films. Carbon 37:807-810
    • (1999) Carbon , vol.37 , pp. 807-810
    • Lagrange, J.P.1
  • 16
    • 0031995432 scopus 로고    scopus 로고
    • High-performance metal-semiconductor field effect transistors from thin-film polycrystalline diamond
    • Looi HJ et al (1998) High-performance metal-semiconductor field effect transistors from thin-film polycrystalline diamond. Diam Rel Mat 7:565-568
    • (1998) Diam Rel Mat , vol.7 , pp. 565-568
    • Looi, H.J.1
  • 17
    • 2342521470 scopus 로고    scopus 로고
    • Thermoeleclric figure-of-merit under large temperature differences
    • Min G et al (2004) Thermoeleclric figure-of-merit under large temperature differences. J Phys D Appl Phys 37:1301-1304
    • (2004) J Phys D Appl Phys , vol.37 , pp. 1301-1304
    • Min, G.1
  • 18
    • 0037346728 scopus 로고    scopus 로고
    • Electronic properties of CVD diamond
    • Nebel CS (2003) Electronic properties of CVD diamond. Semicond Sci Technol 18:S1-S11
    • (2003) Semicond Sci Technol , vol.18
    • Nebel, C.S.1
  • 19
    • 2442532883 scopus 로고    scopus 로고
    • Piezoresistive effect of CVD polycrystalline diamond films
    • Yamamoto A, Sutsumoto TT (2004) Piezoresistive effect of CVD polycrystalline diamond films. Diam Rel Mat 13:863-866
    • (2004) Diam Rel Mat , vol.13 , pp. 863-866
    • Yamamoto, A.1    Sutsumoto, T.T.2
  • 20
    • 0008789067 scopus 로고    scopus 로고
    • Diamond pressure and temperature sensors for high-pressure high-temperature applications
    • Zailsev AM et al (2001) Diamond pressure and temperature sensors for high-pressure high-temperature applications. Phys Stat Sol A 185:59-64
    • (2001) Phys Stat Sol A , vol.185 , pp. 59-64
    • Zailsev, A.M.1
  • 21
    • 0004703077 scopus 로고
    • Effect of mechanical stress on current-voltage characteristics of thin film polycrystalline diamond Schottky diodes
    • Zhao G et al (1993) Effect of mechanical stress on current-voltage characteristics of thin film polycrystalline diamond Schottky diodes. J Appl Phys 73:1832-1837
    • (1993) J Appl Phys , vol.73 , pp. 1832-1837
    • Zhao, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.