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Volumn 12, Issue 4, 2006, Pages 315-323

Application of an optimization methodology for multidisciplinary system design of microgyroscopes

Author keywords

[No Author keywords available]

Indexed keywords

GLOBAL SENSITIVITY; MICROGYROSCOPES; SEARCHING METHODOLOGY; TUNING FORK GYROSCOPES;

EID: 33644525299     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0054-2     Document Type: Article
Times cited : (15)

References (15)
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    • Sysmetric surface micromachined gyroscope with decoupled oscillation modes
    • Alper SE, Akin TA (2002) Sysmetric surface micromachined gyroscope with decoupled oscillation modes. Sens Actuators A 97:347-358
    • (2002) Sens Actuators A , vol.97 , pp. 347-358
    • Alper, S.E.1    Akin, T.A.2
  • 2
    • 0033317749 scopus 로고    scopus 로고
    • Mechanical-thermal noise in micromachined gyros
    • Annovazzi-Lodi V, Merlo S (1999) Mechanical-thermal noise in micromachined gyros. Microelectron J 30:1227-1230
    • (1999) Microelectron J , vol.30 , pp. 1227-1230
    • Annovazzi-Lodi, V.1    Merlo, S.2
  • 4
    • 0035368205 scopus 로고    scopus 로고
    • HARPSS polysilicon vibrating ring gyroscope
    • Ayazi F, Najafi A (2001) HARPSS polysilicon vibrating ring gyroscope. J Microelectromech Syst 10:169-179
    • (2001) J Microelectromech Syst , vol.10 , pp. 169-179
    • Ayazi, F.1    Najafi, A.2
  • 7
    • 0035703441 scopus 로고    scopus 로고
    • FEM of comb-gimbal micromachined gyroscope
    • Che LF, Xiong B, Wang YL (2001) FEM of comb-gimbal micromachined gyroscope. J Mech Strength 23:481-483
    • (2001) J Mech Strength , vol.23 , pp. 481-483
    • Che, L.F.1    Xiong, B.2    Wang, Y.L.3
  • 8
    • 0035506636 scopus 로고    scopus 로고
    • Robust optimal design of a vibratory microgyroscope considering fabrication errors
    • Han JS, Kwak BM (2001) Robust optimal design of a vibratory microgyroscope considering fabrication errors. J Micromech Microeng 11:662-671
    • (2001) J Micromech Microeng , vol.11 , pp. 662-671
    • Han, J.S.1    Kwak, B.M.2
  • 9
    • 0033342699 scopus 로고    scopus 로고
    • Algorithm for global optimization of optical systems based upon genetic competition
    • Denver, CO
    • Kenneth EM (1999) Algorithm for global optimization of optical systems based upon genetic competition. SPIE conference on optical design and analysis software, Denver, CO, pp 40-47
    • (1999) SPIE Conference on Optical Design and Analysis Software , pp. 40-47
    • Kenneth, E.M.1
  • 11
    • 0036771104 scopus 로고    scopus 로고
    • Application of genetic algorithm to conceptual design of a micro-air vehicle
    • Ng TTH, Leng GSB (2002) Application of genetic algorithm to conceptual design of a micro-air vehicle. Eng Appl Artif Intell 15:439-445
    • (2002) Eng Appl Artif Intell , vol.15 , pp. 439-445
    • Ng, T.T.H.1    Leng, G.S.B.2
  • 12
    • 0032046894 scopus 로고    scopus 로고
    • Efficient design and optimization of MEMS by integrating commercial simulation tools
    • Oliver N, Michael T, Bernd H, Frank K (1998) Efficient design and optimization of MEMS by integrating commercial simulation tools. Sens Actuators A 66:15-20
    • (1998) Sens Actuators A , vol.66 , pp. 15-20
    • Oliver, N.1    Michael, T.2    Bernd, H.3    Frank, K.4
  • 13
    • 0036851102 scopus 로고    scopus 로고
    • Global optimization and design for micro electro mechanical systems devices based on simulated annealing
    • Ongkodjojo A, Tay FEH (2002) Global optimization and design for micro electro mechanical systems devices based on simulated annealing. J Micromech Microeng 12:878-897
    • (2002) J Micromech Microeng , vol.12 , pp. 878-897
    • Ongkodjojo, A.1    Tay, F.E.H.2
  • 15
    • 0029296703 scopus 로고
    • Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
    • Veijola T, Kuisma H, Lahdenpera J, Ryhanen T (1995) Equivalent-circuit model of the squeezed gas film in a silicon accelerometer. Sens Actuators A 48:239-248
    • (1995) Sens Actuators A , vol.48 , pp. 239-248
    • Veijola, T.1    Kuisma, H.2    Lahdenpera, J.3    Ryhanen, T.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.