FEM simulation of comb-gimbal micromachined gyroscope

Jixie Qiangdu/Journal of Mechanical Strength

Volumn 23, Issue 4, 2001, Pages 481-483

  Che, Lufeng ^a   Xiong, Bin ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Comb gimbal gyroscope; FEM simulation

Indexed keywords

EID: 0035703441     PISSN: 10019669     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)