Active flying-height control slider using MEMS thermal actuator

Microsystem Technologies

Volumn 12, Issue 4, 2006, Pages 369-375

  Kurita, Masayuki ^a   Shiramatsu, Toshiya ^a   Miyake, Kouji ^b   Kato, Atsushi ^b   Soga, Masahiko ^b   Tanaka, Hideaki ^b   Saegusa, Shozo ^b   Suk, Mike ^b  

^a HITACHI LTD   (Japan)

^b SAN JOSE RESEARCH CENTER   (United States)

Author keywords

Control; Flying height; Magnetic head slider; Micro electro mechanical systems; Thermal actuator

Indexed keywords

ACTUATORS; DEFORMATION; INTERFACES (MATERIALS); MAGNETIC MATERIALS; RELIABILITY; THIN FILMS;

FLYING HEIGHT; MAGNETIC HEAD SLIDER; MICRO ELECTRO-MECHANICAL SYSTEMS; THERMAL ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 33644515308     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0104-4     Document Type: Article

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