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Volumn 38, Issue 5 I, 2002, Pages 2102-2104
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An active-head slider with a piezoelectric actuator for controlling flying height
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Author keywords
Actuator; Flying height; Magnetic head slider; MEMS
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Indexed keywords
COMPUTER SIMULATION;
FABRICATION;
MAGNETIC HEADS;
MAGNETIC RECORDING;
MICROACTUATORS;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRIC DEVICES;
SILICON;
HEAD SLIDERS;
MAGNETIC DISK STORAGE;
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EID: 0036762492
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/TMAG.2002.802843 Document Type: Article |
Times cited : (29)
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References (4)
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