Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 196-199

  Machtle P ^a   Berger, R ^a   Dietzel, A ^a   Despont, M ^b   Haberle W ^b   Stutz, R ^b   Binnig, G K ^b   Vettiger, P ^b  

^a IBM   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; HARD DISK STORAGE; IN SITU PROCESSING; INTERFACES (MATERIALS); RELIABILITY; THERMAL EFFECTS; THIN FILMS;

AIR BEARING SURFACES (ABS); MICROHEATERS; THERMAL ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0035015202     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906512     Document Type: Article

References (0)