A MEMS-based active-head slider for flying height control in magnetic recording

JSME International Journal, Series B: Fluids and Thermal Engineering

Volumn 47, Issue 3, 2004, Pages 453-458

  Suzuki, Kenji ^a   Kurita, Masayuki ^b  

^a KOGAKUIN UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Air bearing surface; Flying height; Hard disk drive; Microelectromechanical systems (MEMS); Piezoelectric thin film; Sol gel method

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; FORCE MEASUREMENT; HARD DISK STORAGE; INTERFEROMETRY; THIN FILMS;

AIR BEARING SURFACE (ABS); LIFT FORCE; MOLECULAR GAS; SLIDERS;

MICROELECTROMECHANICAL DEVICES;

PIEZOELECTRICITY;

EID: 5444244271     PISSN: 13408054     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmeb.47.453     Document Type: Article

References (8)

1. Yeack-Scranton, C.E., Khanna, V.D., Etzold, K.F. and Praino, A.P., An Active Slider for Practical Contact Recording, IEEE Trans. on Magnetics, Vol.26, No.5 (1990), pp.2478-2483.
2. Kurita, M., Yamazaki, T., Kohira, H., Matsumoto, M., Tsuchiyama, R., Xu, J., Harada, T., Inoue, Y., Su, L. and Kato, K., An Active-Head Slider with a Piezoelectric Actuator for Controlling Flying Height, IEEE Trans. on Magnetics, Vol.38, No.5 (2002), pp.2102-2104.
3. Tagawa, N., Design and Fabrication of MEMS-Based Active Sliders Using Double-Layered Composite PZT Thin Films in Hard Disk Drives, Digest of the Asia Pacific Magnetic Recording Conference 2002, (2002), pp.CP4-01-02.
4. Machtle, P., Berger, R., Dietzel, A., Despont, M., Haberle, W., Stutz, R., Binnig, G.K. and Vettiger, P., Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives, IEEE Proceedings of MEMS Conference 2001, (2001), pp.196-199.
5. Khanna, V.D. and Hendriks, F., Programmable Air Bearing Sliders for Magnetic Storage, STLE Special Publication, SP-29, (1990), pp.43-48.
6. Fukui, S. and Kaneko, R., Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation, First Report: Derivation of a Generalized Lubrication Equation Including Thermal Creep Flow, Trans. ASME, J. Tribology, Vol.110 (1988), pp.253-261.
7. Fukui, S. and Kaneko, R., A Database for Interpolation of Poiseuille Flow Rates for High Knudsen Number Lubrication Problems, Trans. ASME, J. Tribology, Vol.112 (1990), pp.78-83.
8. Castelli, V. and Pirvics, J., Review of Numerical Methods in Gas Bearing Film Analysis, Trans. ASME, J. Lubrication Technology, (1990), pp.777-792.