Selective growth of carbon nanostructures on nickel implanted nanopyramid array

Applied Surface Science

Volumn 234, Issue 1-4, 2004, Pages 72-77

  Ferrer, D ^a   Shinada, T ^a   Tanii, T ^a   Kurosawa, J ^a   Zhong, G ^a   Kubo, Y ^a   Okamoto, S ^a   Kawarada, H ^a   Ohdomari, I ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Carbon nanostructures; Focused ion beam; Nanopyramid array; Ni; p CVD; Selectivity; Single ion implantation

Indexed keywords

ARRAYS; CARBON; FABRICATION; ION BEAMS; ION IMPLANTATION; METHANE; NICKEL; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY;

CARBON NANOSTRUCTURES; FOCUSED ION BEAMS; NANOPYRAMID ARRAYS; P-CVD; SELECTIVITY; SINGLE ION IMPLANTATION;

NANOSTRUCTURED MATERIALS;

EID: 3342875879     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.05.180     Document Type: Conference Paper

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