Role of electronic and nuclear energy losses in swift heavy ion beam induced epitaxial crystallization of a buried Si3N4 layer

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 245, Issue 1, 2006, Pages 255-259

  Som, T ^a   Satpati, B ^a   Sinha, O P ^a,c   Avasthi, D K ^b   Kanjilal, D ^b  

^a INSTITUTE OF PHYSICS   (India)

^b INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^c Icfai Institute of Science and Technology   (India)

Author keywords

Ion beam induced epitaxial crystallization; Swift heavy ions; Transmission electron microscopy

Indexed keywords

CRYSTALLIZATION; EPITAXIAL GROWTH; HEAVY IONS; NUCLEAR ENERGY; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRONIC ENERGY; ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION; SWIFT HEAVY IONS;

ION BEAMS;

EID: 33344460314     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.11.112     Document Type: Conference Paper

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