An advanced method for measuring the residual stress of deposited film utilizing laser spallation technique

Science and Technology of Advanced Materials

Volumn 7, Issue 1 SPEC. ISS., 2006, Pages 90-96

  Ikeda, R ^a   Uchiyama, T ^b   Cho, H ^b   Ogawa, T ^b   Takemoto, M ^b  

^a Asahi Diamond Industrial Co Ltd   (Japan)

^b AOYAMA GAKUIN UNIVERSITY   (Japan)

Author keywords

CVD diamond film; Grain boundary structure; Laser spallation; Residual stress

Indexed keywords

DEPOSITION; LASER APPLICATIONS; RESIDUAL STRESSES; SPALLING; THIN FILMS;

CVD DIAMOND FILM; GRAIN BOUNDARY STRUCTURE; LASER SPALLATION;

DIAMOND FILMS;

EID: 33344457873     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.stam.2005.11.008     Document Type: Article

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