Measurement of residual stress in diamond films obtained using chemical vapor deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 7 SUPPL. B, 1998, Pages

  Kim, Jung Geun ^a   Yu, Jin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Curvature method; CVD diamond film; Raman spectroscopy; Residual stress; Sonic resonance method; XRD sin2 method; Young's modulus of diamond film

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; FILMS; PRESSURE MEASUREMENT; RAMAN SPECTROSCOPY; RESIDUAL STRESSES;

STRESS MEASUREMENT;

DIAMONDS;

EID: 11744386903     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l890     Document Type: Article

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