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Volumn 73, Issue 8, 2006, Pages

Photon-stimulated desorption from chlorinated Si(111): Etching of SiCl by picosecond-pulsed laser irradiation

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EID: 33244461953     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.73.085309     Document Type: Article
Times cited : (6)

References (36)
  • 5
    • 0028540045 scopus 로고
    • SUSCAS 0039-6028 10.1016/0039-6028(94)00517-6
    • K. Shudo, F. Komori, K. Hattori, and Y. Murata, Surf. Sci. SUSCAS 0039-6028 10.1016/0039-6028(94)00517-6 320, 161 (1994).
    • (1994) Surf. Sci. , vol.320 , pp. 161
    • Shudo, K.1    Komori, F.2    Hattori, K.3    Murata, Y.4
  • 10
    • 3643143195 scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.63.306
    • J. S. Villarrubia and J. J. Boland, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.63.306 63, 306 (1989).
    • (1989) Phys. Rev. Lett. , vol.63 , pp. 306
    • Villarrubia, J.S.1    Boland, J.J.2
  • 11
    • 4243473902 scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.41.9865
    • J. J. Boland and J. S. Villarrubia, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.41.9865 41, 9865 (1990).
    • (1990) Phys. Rev. B , vol.41 , pp. 9865
    • Boland, J.J.1    Villarrubia, J.S.2
  • 18
    • 5644270489 scopus 로고
    • SSREDI 0167-5729 10.1016/0167-5729(96)80001-X
    • F. M. Zimmermann and W. Ho, Surf. Sci. Rep. SSREDI 0167-5729 10.1016/0167-5729(96)80001-X 22, 127 (1995).
    • (1995) Surf. Sci. Rep. , vol.22 , pp. 127
    • Zimmermann, F.M.1    Ho, W.2
  • 19
    • 4243110442 scopus 로고
    • JAPIAU 0021-8979
    • J. H. Bechtel, J. Appl. Phys. JAPIAU 0021-8979 46, 1975 (1975).
    • (1975) J. Appl. Phys. , vol.46 , pp. 1975
    • Bechtel, J.H.1
  • 20
    • 0001172507 scopus 로고
    • JCOMEL 0953-8984 10.1088/0953-8984/7/36/003
    • P. V. Smith and Pei-Lin Cao, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/7/36/003 7, 7125 (1995).
    • (1995) J. Phys.: Condens. Matter , vol.7 , pp. 7125
    • Smith, P.V.1    Cao, P.2
  • 21
    • 0033319286 scopus 로고    scopus 로고
    • SUSCAS 0039-6028 10.1016/S0039-6028(99)00539-7
    • H. Aizawa, S. Tsuneyuki, and T. Ogitsu, Surf. Sci. SUSCAS 0039-6028 10.1016/S0039-6028(99)00539-7 438, 18 (1999).
    • (1999) Surf. Sci. , vol.438 , pp. 18
    • Aizawa, H.1    Tsuneyuki, S.2    Ogitsu, T.3
  • 22
    • 0001430313 scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.52.11412
    • R. J. Pechman, X.-S. Wang, and J. H. Weaver, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.52.11412 52, 11412 (1995).
    • (1995) Phys. Rev. B , vol.52 , pp. 11412
    • Pechman, R.J.1    Wang, X.-S.2    Weaver, J.H.3
  • 23
    • 0037430716 scopus 로고    scopus 로고
    • SUSCAS 0039-6028 10.1016/S0039-6028(03)00071-2
    • M. Tanaka, S. Minami, K. Shudo, and E. Yamakawa, Surf. Sci. SUSCAS 0039-6028 10.1016/S0039-6028(03)00071-2 527, 21 (2003).
    • (2003) Surf. Sci. , vol.527 , pp. 21
    • Tanaka, M.1    Minami, S.2    Shudo, K.3    Yamakawa, E.4
  • 26
  • 27
    • 0031117387 scopus 로고    scopus 로고
    • SUSCAS 0039-6028 10.1016/S0039-6028(96)01403-3
    • X. H. Chen, J. C. Polanyi, and D. Rogers, Surf. Sci. SUSCAS 0039-6028 10.1016/S0039-6028(96)01403-3 376, 77 (1997).
    • (1997) Surf. Sci. , vol.376 , pp. 77
    • Chen, X.H.1    Polanyi, J.C.2    Rogers, D.3
  • 30
  • 31
    • 0031123624 scopus 로고    scopus 로고
    • SUSCAS 0039-6028 10.1016/S0039-6028(96)01464-1
    • H. Aizawa and S. Tsuneyuki, Surf. Sci. SUSCAS 0039-6028 10.1016/S0039-6028(96)01464-1 377, 610 (1997).
    • (1997) Surf. Sci. , vol.377 , pp. 610
    • Aizawa, H.1    Tsuneyuki, S.2
  • 32
    • 0034401617 scopus 로고    scopus 로고
    • CMPHC2 0301-0104 10.1016/S0301-0104(99)00299-2
    • J. W. Gadzuk, Chem. Phys. CMPHC2 0301-0104 10.1016/S0301-0104(99)00299-2 251, 87 (2000).
    • (2000) Chem. Phys. , vol.251 , pp. 87
    • Gadzuk, J.W.1
  • 34
    • 6244250720 scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.46.1853
    • M. Head-Gordon, and J. C. Tully, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.46.1853 46, 1853 (1992).
    • (1992) Phys. Rev. B , vol.46 , pp. 1853
    • Head-Gordon, M.1    Tully, J.C.2
  • 35
    • 12044255509 scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.72.1364
    • J. R. Goldman and J. A. Prybyla, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.72.1364 72, 1364 (1994).
    • (1994) Phys. Rev. Lett. , vol.72 , pp. 1364
    • Goldman, J.R.1    Prybyla, J.A.2
  • 36
    • 0001202250 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.54.R17300
    • S. Jeong, H. Zacharias, and J. Bokor, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.54.R17300 54, R17300 (1996).
    • (1996) Phys. Rev. B , vol.54 , pp. 17300
    • Jeong, S.1    Zacharias, H.2    Bokor, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.