Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling

Optics Express

Volumn 14, Issue 4, 2006, Pages 1505-1511

  Chaganti, Kalyani ^a   Salakhutdinov, Ildar ^a   Avrutsky, Ivan ^a   Auner, Gregory W ^a   Mansfield, John ^b  

^a Wayne State University   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HAFNIUM COMPOUNDS; ION BEAMS; MILLING (MACHINING); OPTICAL FIBER FABRICATION; OPTICAL WAVEGUIDES; THIN FILMS;

FOCUSED ION BEAM MILLING; GRATING IMPERFECTIONS; SUB-MICRON GRATING FABRICATION;

DIFFRACTION GRATINGS;

EID: 33144483368     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.001505     Document Type: Article

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