Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam

Optics Express

Volumn 13, Issue 21, 2005, Pages 8618-8624

  Zinoviev, Kirill E ^a   Dominguez, Carlos ^a   Vilà, Anna ^b  

^a SHANGHAI UNIVERSITY   (China)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC CONNECTORS; ELECTRON BEAM LITHOGRAPHY; ION BEAMS; MICROPROCESSOR CHIPS; MILLING MACHINES; SILICON COMPOUNDS;

DIFFRACTION GRATING COUPLERS; GAUSSIAN BEAMS; ION BEAM MILLING; SILICON NITRIDE WAVEGUIDES;

DIFFRACTION GRATINGS;

EID: 84894022465     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.008618     Document Type: Article

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