Focused ion beam fabricated microgratings for integrated optics applications

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 6, 2002, Pages 1323-1330

  Cheng, Ji ^a   Steckl, A J ^a  

^a University of Cincinnati   (United States)

Author keywords

Diffraction efficiency; Diffractive wavelength resolution; Focused ion beam (FIB); Microgratings

Indexed keywords

EFFICIENCY; FIBER OPTICS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED OPTICS; ION BEAM LITHOGRAPHY; LASER APPLICATIONS; LIGHT POLARIZATION; OPTICAL COMMUNICATION; OPTICAL RESOLVING POWER;

DIFFRACTION EFFICIENCY; DIFFRACTIVE OPTICAL ELEMENT; DIFFRACTIVE WAVELENGTH RESOLUTION; DIRECT WRITE PATTERNING TECHNIQUE; FOCUSED ION BEAM; MICROGRATINGS;

DIFFRACTION GRATINGS;

EID: 0036881870     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2002.806676     Document Type: Article

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