Uniform and selective CVD growth of carbon nanotubes and nanofibres on arbitrarily microstructured silicon surfaces

Nanotechnology

Volumn 17, Issue 5, 2006, Pages 1397-1403

  Hart, A J ^a   Boskovic, B O ^b   Chuang, A T H ^b   Golovko, V B ^b   Robertson, J ^b   Johnson, B F G ^b   Slocum, A H ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SILICON;

CATALYST DEPOSITION; MICROSTRUCTURED SURFACES;

CARBON NANOTUBES;

EID: 33144470759     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/17/5/039     Document Type: Article

References (42)

1. Dai H 2001 Nanotube growth and characterization Carbon Nanotubes: Synthesis, Structure, Properties and Applications ed M S Dresselhaus, G Dresselhaus and P Avouris (New York: Springer) p 29
2. Merkulov V I, Lowndes D H, Wei Y Y, Eres G and Voelkl E 2000 Appl. Phys. Lett. 76 3555
3. Kong J, Soh H T, Cassell A M, Quate C F and Dai H J 1998 Nature 395 878
4. Ren Z F, Huang Z P, Xu J W, Wang J H, Bush P, Siegal M P and Provencio P N 1998 Science 282 1105
5. Hofmann S, Ducati C, Kleinsorge B and Robertson J 2003 Appl. Phys. Lett. 83 4661
6. Ward J W, Wei B Q and Ajayan P M 2003 Chem. Phys. Lett. 376 717
7. Snow E S, Novak J P, Campbell P M and Park D 2003 Appl. Phys. Lett. 82 2145
8. Star A, Han T R, Joshi V, Gabriel J C P and Gruner G 2004 Adv. Mater. 16 2049
9. Ghosh S, Sood A K and Kumar N 2003 Science 299 1042
10. Tzeng Y, Chen Y and Liu C 2003 Diamond Relat. Mater. 12 774
11. Teh W H, Smith C G, Teo K B K, Lacerda R G, Amaratunga G A J, Milne W I, Castignolles M and Loiseau A 2003 J. Vac. Sci. Technol. B 21 1380
12. Wei B Q, Vajtai R, Jung Y, Ward J, Zhang R, Ramanath G and Ajayan P M 2003 Chem. Mater. 15 1598
13. Cao A, Baskaran R, Frederick M J, Turner K, Ajayan P M and Ramanath G 2003 Adv. Mater. 15 1105
14. Boskovic B O, Golovko V B, Cantoro M, Kleinsorge B, Chuang A T H, Ducati C, Hofmann S, Robertson J and Johnson B F G 2005 Carbon 43 2643
15. Correa-Duarte M A, Wagner N, Rojas-Chapana J, Morsczeck C, Thie M and Giersig M 2004 Nano Lett. 4 2233
16. Zhang X, Prasad S, Niyogi S, Morgan A, Ozkan M and Ozkan C S 2005 Sensors Actuators B 106 843
17. Lovat V, Pantarotto D, Lagostena L, Cacciari B, Grandolfo M, Righi M, Spalluto G, Prato M and Ballerini L 2005 Nano Lett. 5 1107
18. Cantoro M et al 2005 Diamond Relat. Mater. 14 733
19. Jansen H, de Boer M, Legtenberg R and Elwenspoek M 1995 J. Micromech. Microeng. 5 115
20. Jansen H, Gardeniers M, de Boer M, Elwenspoek M and Fluitman J 1996 J. Micromech. Microeng. 6 14
21. Hart A J, Slocum A H and Royer L 2006 Carbon 44 348
22. Chen J P, Lee K M, Sorensen C M, Klabude K J and Hadjipanayis G C 1994 J. Appl. Phys. 75 5876
23. Kleinsorge B, Golovko V B, Hofmann S, Geng J, Jefferson D and Robertson J 2004 Chem. Commun. 12 1416
24. Raja R, Golovko V B, Thomas J M, Berenguer-Murcia A, Zhou W, Xie S H and Johnson B F G 2005 Chem. Commun. 15 2026
25. Hofmann S, Ducati C, Kleinsorge B and Robertson J 2003 Appl. Phys. Lett. 83 135
26. Golovko V B et al 2005 Nanotechnology 16 1636
27. Baker R T K and Harris P S 1978 The formation of filamentous carbon Chemistry and Physics of Carbon ed P L Walker and P A Thrower (New York: Dekker) p 83
28. Helveg S, Lopez-Cartes C, Sehested J, Hansen P L, Clausen B S, Rostup-Nielsen J R, Abild-Pedersen F and Norskov J 2004 Nature 415 152
29. Hofmann S, Csanyi G, Ferrari A C, Payne M C and Robertson J 2005 Phys. Rev. Lett. 95 036101
30. Lin C H, Chang H L, Hsu C M, Lo A Y and Kuo C T 2003 Diamond Relat. Mater. 12 1851
31. Teo K B K, Chhowala M, Amaratunga G A J, Milne W I, Hasko D G, Pirio G, Legagneux P, Wyczisk F and Pribat D 2001 Appl. Phys. Lett. 79 1534
32. Endo M, Nishimura K, Kim Y A, Hakamada K, Matushita T, Dresselhaus M S and Dresselhaus G 1999 J. Mater. Res. 14 4474
33. Madou M J 2002 Fundamentals of Microfabrication (London: CRC Press)
34. Chhowalla M, Teo K B K, Ducati C, Rupesinghe N L, Amaratunga G A J, Ferrari A C, Roy D, Robertson J and Milne W I 2001 J. Appl. Phys. 90 5308
35. Hofmann S, Cantoro M, Kleinsorge B, Casiragha C, Parvez A and Robertson J 2005 J. Appl. Phys. 98 034308
36. Delzeit L, Chen B, Cassell A, Stevens R, Nguyen C and Meyyappan M 2001 Chem. Phys. Lett. 348 368
37. Alvarez W E, Kitiyanan B, Borgna A and Resasco D E 2001 Carbon 39 547
38. Jung Y J, Wei B Q, Vajtai R and Ajayan P M 2003 Nano Lett. 3 561
39. Feng L, Li S H, Li Y S, Li H J, Zhang L J, Zhai J, Song Y L, Liu B Q, Jiang L and Zhu D B 2002 Adv. Mater. 14 1857
40. Herminghaus S 2000 Europhys. Lett. 52 165
41. Otten A and Herminghaus S 2004 Langmuir 20 2405
42. Lau K K S, Bico J, Teo K B K, Chhowalla M, Amaratunga G A J, Milne W I, McKinley G H and Gleason K K 2003 Nano Lett. 3 1701