Integrating vertically aligned carbon nanotubes on micromechanical structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1380-1383

  Teh, W H ^a   Smith, C G ^a,d   Teo, K B K ^b   Lacerda, R G ^b   Amaratunga, G A J ^b   Milne, W I ^b   Castignolles, M ^c   Loiseau, A ^c  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c Centre National de la Recherche Scientifique   (France)

^d Cavendish Kinetics Ltd   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; MICROMACHINING; MICROSTRUCTURE; POLYMETHYL METHACRYLATES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA;

MICROMECHANICAL STRUCTURES;

CARBON NANOTUBES;

EID: 0141569859     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1591743     Document Type: Conference Paper

References (11)

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