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Volumn 5963, Issue , 2005, Pages
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Innovative production of thin film laser components
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Author keywords
Clean room production; Laser; Magnetron sputtering; Optical thin films; Ultra fast pulse laser
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Indexed keywords
COST EFFECTIVENESS;
LASERS;
MAGNETRON SPUTTERING;
MULTILAYERS;
OPTICAL PROPERTIES;
CLEAN ROOM PRODUCTION;
OPTICAL THIN FILMS;
ULTRA FAST PULSE LASER;
THIN FILMS;
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EID: 33144464078
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.625226 Document Type: Conference Paper |
Times cited : (17)
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References (9)
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