Closed Field Magnetron Sputtering: A New Strategy for Multilayer Optical Coatings

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2003, Pages 387-392

  Walls, J M ^a   Gibson, D R ^a   Brinkley, I ^a   Teer, D G ^b   Teer, P ^b   Hampshire, J ^b  

^a Applied Multilayers Ltd   (United Kingdom)

^b TEER COATINGS LTD   (United Kingdom)

Author keywords

Ion assisted deposition; Magnetron sputtering; Optical coating equipment; Optical coatings

Indexed keywords

CURRENT DENSITY; MAGNETRON SPUTTERING; OPTICAL MULTILAYERS; OXIDATION;

RADIO FREQUENCY (RF) SPUTTERING;

OPTICAL COATINGS;

EID: 0242353399     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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