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Surface and Coatings Technology

Volumn 200, Issue 11, 2006, Pages 3411-3417

Physical and mechanical properties of chromium zirconium nitride thin films

(5) Aouadi, S M a Maeruf, T a Twesten, R D b Mihut, D M c Rohde, S L c

a SOUTHERN ILLINOIS UNIVERSITY (United States)

b United States of America (United States)

c UNIVERSITY OF NEBRASKA LINCOLN (United States)

Author keywords

Ellipsometry; Nanoindentation; Nitrides; Sputtering

Indexed keywords

COMPOSITION; ELLIPSOMETRY; GRAIN BOUNDARIES; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; PHYSICAL PROPERTIES; SPUTTERING; THIN FILMS; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHROMIUM ZIRCONIUM NITRIDE; DRUDE-LORENTZ MODEL; NANOINDENTATION;

NITRIDES;

COMPOSITION; ELLIPSOMETRY; GRAIN BOUNDARIES; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; NITRIDES; PHYSICAL PROPERTIES; SPUTTERING; THIN FILMS; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 32544460388 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.169 Document Type: Article

Times cited : (46)

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