Propagation of stacking faults from surface damage in SiC PiN diodes

Applied Physics Letters

Volumn 88, Issue 6, 2006, Pages

  Zhang, Z ^a   Maximenko, S I ^a   Shrivastava, A ^a   Sadagopan, P ^a   Gao, Y ^a,b   Sudarshan, T S ^a  

^a The Department of Mechanical Engineering   (United States)

^b SENSOR ELECTRONIC TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BASAL PLANE DISLOCATIONS (BPD); STACKING FAULTS (SF);

DISLOCATIONS (CRYSTALS); SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE;

SEMICONDUCTOR DIODES;

EID: 32544448392     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2172015     Document Type: Review

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