Micro/nanotribological and mechanical studies of TiN thin-film for MEMS applications

Tribology Transactions

Volumn 47, Issue 2, 2004, Pages 227-232

  Cao, Xiankun ^a   Shao, Tianmin ^a   Wen, Shizhu ^a   Yao, Yuan ^b  

^a TSINGHUA UNIVERSITY   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Micro nanomechanical and tribological properties; Microelectromechanical systems (MEMS); Single crystal silicon; TiN thin films

Indexed keywords

FRICTION; HARDNESS; SILICON; SINGLE CRYSTALS; THIN FILMS; TITANIUM NITRIDE; TRIBOLOGY; WEAR RESISTANCE; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY;

NANOINDENTER SYSTEM; NANOTRIBOLOGY; MICRO/NANOMECHANICAL AND TRIBOLOGICAL PROPERTIES; MICROELECTROMECHANICAL SYSTEMS (MEMS); SINGLE-CRYSTAL SILICON; TIN THIN FILMS;

MICROELECTROMECHANICAL DEVICES; THIN FILMS;

LUBRICATION; MECHANICAL PROPERTY; SOLID LUBRICANT; TITANIUM NITRIDE; TRIBOLOGY;

EID: 3242763004     PISSN: 10402004     EISSN: None     Source Type: Journal    
DOI: 10.1080/05698190490439076     Document Type: Article

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