Current-dependent growth of silicon nitride lines using a conducting tip AFM

Surface Science

Volumn 423, Issue 2, 1999, Pages

  Workman, R K ^a   Peterson, C A ^a   Sarid, D ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ATOMIC FORCE MICROSCOPY; ELECTRIC CURRENT MEASUREMENT; NANOTECHNOLOGY; SEMICONDUCTOR GROWTH; SILICON NITRIDE; SUBSTRATES; SURFACE CHEMISTRY;

NITRIDATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0345534623     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00085-0     Document Type: Article

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