Quantification of properties of ferroelectric thin film using piezoresponse force microscopy

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Volumn , Issue , 2005, Pages 671-674

  Cain, M G ^a   Lowe, M J ^a   Cuenat, A ^a   Stewart, M ^a   Blackburn, J ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Characterisation; Ferroelectric; Lead zirconate titanate; Piezoresponse force microscopy; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; CONTAMINATION; ELECTRIC FIELDS; FINITE DIFFERENCE METHOD; INTERFEROMETERS; LEAD COMPOUNDS; SURFACE PROPERTIES;

LEAD ZIRCONATE TITANATE; PIEZORESPONSE FORCE MICROSCOPY;

FERROELECTRIC THIN FILMS;

EID: 32144439379     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. O. Auciello, J. F. Scott and R. Ramesh, Phys. Today 51, 22-27, 1998.
2. P. Muralt, J. Micromech. Microeng. 10, 136-146, 2000.
3. T. M. Shaw, Z. Suo, M. Huang, E. Liniger, R. B. Laibowitz and J. D. Baniecki, Appl. Phys. Lett. 75, 2129-2131, 1999.
4. V. Nagarajan, A. Roytburd, A. Sanishevsky, S. Prasertchoung, T. Zhao, L. Chen, J. Melngailis, O. Auciello and R. Ramesh, Nature Materials 2, 43-47, 2003.
5. A. Gruverman, O. Auciello and H. Tokumoto, Annu. Rev. Mater. Sci. 28, 101-123, 1998.
6. S. Dunn, C. P. Shaw, Z. Huang and R. W. Whatmore, Nanotechnology 13, 456-459, 2002.
7. F. Felten, G. A. Scheider, J. Munoz Saldana and S. V. Kalinin, J. Appl. Phys. 96 563-568, 2004.
8. S. V. Kalinin and D. A. Bonnell, Phys. Rev. B 65 125408-1-125408-11, 2002.
9. M. G. Cain, S. Dunn and P. Jones, Technical Proceedings of the 2004 Nanotechnology Conference and Trade Show, Volume 3, 362-365, 2004.
10. Analysis using MTDATA: software copywrite NPL.
11. V. E. Bottom, J. Appl. Phys. 41, 3941-3944, 1970.
12. Vernitron Bulletin, "Five Modern Piezoelectric Ceramics", Bulletin 66011/F, Jan 1976.
13. F. Peter, K. Szot, R. Waser, B. Reichenberg, S. Tiedke and J. Szade, Appl. Phys. Lett. 85, 2896-2898, 2004.