Quantitative failure analysis for MEMS materials with multiple active flaw populations

Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics

Volumn , Issue , 2005, Pages 1103-1108

  McCarty, A ^a   Chasiotis, I ^b  

^a University of Virginia   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; PARAMETER ESTIMATION; POLYSILICON; PROBABILITY; STRENGTH OF MATERIALS;

DETERMINTAL FLAWS; SECOND FLAW POPULATION; WEIBULL STATISTICS;

TUNGSTEN;

EID: 32044457367     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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