Optical properties of nanostructures based on silicon rich silicon oxide (SRSO) thin films

Proceedings - Electrochemical Society

Volumn PV 2005-01, Issue , 2005, Pages 136-147

  Roschuk, T ^a   Wojcik, J ^a   Comedi, D ^a   Flynn, M J ^a   Irving, F A ^a   Zalloum, O H Y ^a   Mascher, P ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLOTRON RESONANCE; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; WAVEGUIDES;

COMPOSITION RANGING; HIGH TEMPERATURE ANNEALING; SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 31844445023     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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