Conductive atomic force microscopy study of leakage currents through microscopic structural defects in high-k gate dielectrics

Proceedings - Electrochemical Society

Volumn PV 2005-10, Issue , 2005, Pages 159-164

  Stefanov, Yordan ^a   Singh, Ravneet ^b   DasGupta, Nandita ^a,b   Misra, Pankaj ^c   Schwalke, Udo ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^c RAJA RAMANNA CENTRE FOR ADVANCED TECHNOLOGY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITORS; DEFECTS; DIELECTRIC MATERIALS; ELECTRON TRANSPORT PROPERTIES; TITANIUM DIOXIDE;

CONDUCTIVE ATOMIC FORCE MICROSCOPY; MACROSCOPIC ELECTRICAL MEASUREMENTS; SPACIAL RESOLUTION; TOPOGRAPHIC INFORMATION;

LEAKAGE CURRENTS;

EID: 31744447448     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. International Technology Roadmap for Semiconductors 2003 Edition, Executive Summary, http://public.itrs.net/Files/2003ITRS/Home2003.htm.
2. U. Schwalke and Y. Stefanov, Microelectronics Reliability, 45, pp. 790-793 (2004).
3. B. He, T. Ma, S. A. Campbell and W. L. Gladfelter, Electron Devices Meeting International, IEDM '98 Technical Digest, pp. 1038-1040 (1998).
4. S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM Journal of Research and Development, 43, pp. 383-392 (1999).
5. M. Kadoshima, M. Hiratani, Y. Shimamoto, K. Torii, H. Miki, S. Kimura and T. Nabatame, Thin Solid Films, 424, pp. 224 -228 (2003).
6. J. Pascual, J. Camassel and H. Mathieu, Physical Review B, 18, p. 5606 (1978).
7. K. J. Hubbard and D. G. Schlom, Journal of Material Research, 11, p. 2757 (1996).
8. Singh, R. K. and J. Narayan, Physical Review B, 31, pp. 8843-8861 (1990).
9. W. Kern and D. A. Pountinen, RCA Review, 31, pp. 187-202 (1970).
10. R. Paily, A. DasGupta, N. DasGupta, P. Misra and L. M.Kukreja, Thin Solid Films, vol. 462-463C, pp. 57-62 (2004).
11. Dimension 3100 Datasheet, http://www.veeco.com/html/datasheet_d3100.asp
12. 236 Source-Measure Unit, http://www.keithley.com/products/currentvoltage/ ?mn=236