Deposition of vertically oriented carbon nanofibers in atmospheric pressure radio frequency discharge

Journal of Applied Physics

Volumn 99, Issue 2, 2006, Pages

  Nozaki, Tomohiro ^a   Goto, Tomoya ^a   Okazaki, Ken ^a   Ohnishi, Kuma ^a   Mangolini, Lorenzo ^b   Heberlein, Joachim ^b   Kortshagen, Uwe ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST PARTICLES; CATHODIC ION SHEATH; DIELECTRIC BARRIERS; METALLIC ELECTRODES;

ATMOSPHERIC PRESSURE; CARBON FIBERS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELECTRODES; PLASMAS; RADIO FREQUENCY AMPLIFIERS;

CARBON NANOTUBES;

EID: 31644437974     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2163997     Document Type: Article

References (14)

1. T. Nozaki, Y. Kimura, and K. Okazaki, J. Phys. D 35, 2279 (2002).
2. T. Nozaki, Y. Kimura, K. Okazaki, and S. Kado, Control Growth of Carbon Nanotubes Using Pulsed Glow Barrier Discharge, Plasma Processes and Polymers (Wiley-VCH, Weinheim, 2004), p. 477.
3. T. Nozaki, Y. Unno, and K. Okazaki, Plasma Sources Sci. Technol. 11, 431 (2002).
4. F. Massines, P. Segur, N. Gherardi, C. Khamphan, and A. Ricard, Surf. Coat. Technol. 174-175, 8 (2003).
5. L. Mangolini, C. Anderson, J. Heberlein, and U. Kortshagen, J. Phys. D 37, 1021 (2004).
6. A. V. Melechko, V. I. Merkulov, T. E. McKnight, M. A. Guillorn, K. L. Klein, D. H. Lowndes, and M. L. Simpson, J. Appl. Phys. 97, 041301 (2005).
7. X. Yuan and L. L. Raja, IEEE Trans. Plasma Sci. 31, 495 (2003).
8. J. Park, I. Henins, H. W. Herrmann, G. S. Selwyn, and R. F. Hicks, J. Appl. Phys. 89, 20 (2001).
9. R. Hatakeyama, G.-H. Jeong, T. Kato, and T. Hirata, J. Appl. Phys. 96, 6053 (2004).
10. M. Chhowalla, J. Appl. Phys. 90, 5308 (2001).
11. D. Hash, D. Bose, T. R. Govindan, and M. Meyyappan, J. Appl. Phys. 93, 6284 (2003).
12. M. Meyyappan, L. Delzeit, A. Cassell, and D. Hash, Plasma Sources Sci. Technol. 12, 205 (2003).
13. C. Taschner, F. Pacal, A. Leonhardt, P. Spatenka, K. Bartsch, A. Graff, and R. Kaltofen, Surf. Coat. Technol. 174-175, 81 (2003).
14. R. Yu, Gas Discharge Physics (Springer, Berlin, 1991).