Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 81-87

  Taschner Ch ^a   Pacal F ^a   Leonhardt, A ^a   Spatenka, P ^b   Bartsch, K ^a   Graff, A ^a   Kaltofen, R ^a  

^a IFW DRESDEN   (Germany)

^b UNIVERSITY OF SOUTH BOHEMIA   (Czech Republic)

Author keywords

CVD; Hot filament; Multi walled carbon nanotubes; Plasma enhanced

Indexed keywords

ELECTRIC POTENTIAL; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

DISCHARGE VOLTAGE;

CARBON NANOTUBES;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 5744225029     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00712-6     Document Type: Article

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