Influence of CH4 partial pressure on the microstructure of sputter-deposited tungsten carbide thin films

Journal of Physics Condensed Matter

Volumn 18, Issue 6, 2006, Pages 1913-1925

  Abdelouahdi, K ^a   Sant, C ^a   Miserque, F ^b   Aubert, P ^a   Zheng, Y ^c   Legrand Buscema, C ^a   Perriere J ^c  

^a Laboratoire d'Etude des Milieux Nanométriques   (France)

^b CEA SACLAY   (France)

^c INSTITUT DES NANOSCIENCES DE PARIS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PARTIAL PRESSURE; THIN FILMS; TUNGSTEN CARBIDE; X RAY DIFFRACTION ANALYSIS;

CHEMICAL STATES; RF SPUTTERING; TUNGSTEN TARGET;

METHANE;

EID: 31644435181     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/6/008     Document Type: Article

References (30)

1. Toth L E 1971 Transition Metal Carbides and Nitrides (New York: Academic)
2. Rudy E 1967 J. Am. Ceram. Soc. 50 272
3. Uhrenius B 1984 Calculation of the Ti-C, W-C, and Ti-W-C phase diagrams CALPHAD 8 101-19
4. Gustafson P 1986 Thermodynamic properties of the Co-W-C system Mater. Sci. Technol. 2 653-8
5. Toth L E 1971 Transition Metal Carbides and Nitrides (New York: Academic) p 85
6. Demetriou Marios D, Ghoniem Nasr M and Lavine A S 2002 J. Phase Equilib. 23 305-9
7. Palmquist J P, Czigany Zs, Odén M, Neidhart J, Hultman L and Jansson U 2003 Thin Solid Films 444 29-37
8. Voevodin A A, O'Neil J P, Prasad S V and Zabinski J S 1999 J. Vac. Sci. Technol. 17 986
9. Srivastava P K, Vankar V D and Chopra K L 1985 J. Vac. Sci. Technol. A 3 2129
10. Srivastava P K, Vankar V D and Chopra K L 1986 J. Vac. Sci. Technol. A 4 2819
11. Gouy-Pailler Ph and Pauleau Y 1993 J. Vac. Sci. Technol. A 11 96-102
12. Cavaleiro A, Vieira M T and Lempériere G 1990 Thin Solid Films 185 199-217
13. Keller G, Barzen I, Dotter W, Erz R, Ulrich S, Jung K and Ehrhardt H 1991 Mater. Sci. Eng. A 139 137-43
14. Machida K, Enyo M and Toyoshima I 1988 Thin Solid Films 161 L91-5
15. Rinçon C, Zambrano G, Carvajal A, Prieto P, Galindo H, Matinez E, Lousa A and Esteve J 2001 Surf. Coat. Technol. 148 277-83
16. Radic N, Pivac B, Meinardi F and Koch Th 2005 Mater. Sci. Eng. A 396 290-5
17. Zambrano G, Riascos H, Prieto P, Restrepo E, Devia A and Rinçon C 2003 Surf. Coat. Technol. 172 144-9
18. Bewilogua K and Dimigen H 1993 Surf. Coat. Technol. 61 144-50
19. Esteve J, Zambrano G, Rinçon C, Martinez E, Galindo H and Prieto P 2000 Thin Solid Films 373 282-6
20. Pauleau Y and Gouy-Pailler Ph 1992 J. Mater. Res. 7 2070-9
21. Van Dyun W and Van LchemàLochem B 1989 Thin Solid Films 181 497-503
22. Srivastava P K, Vankar V D and Chopra K L 1988 Thin Solid Films 161 107-16
23. Rinçon C, Romeo J, Esteve J, Martinez E and Lousa A 2003 Surf. Coat. Technol. 163/164 386-91
24. Monteiro O R, Deplancke-Ogletree M P D, Yu Lo R, Winand R and Brown I 1997 Surf. Coat. Technol. 94/95 220-5
25. Wang D Z, Chen J X, Zhang H L and Huang N K 2000 Nucl. Instrum. Methods Phys. Res. B 171 465-9
26. Oliver W C and Pharr G M 1992 J. Mater. Res. 7 1564
27. Luthin J and Linsmeier Ch 2000 Surf. Sci. 454-456 78-82
28. Musil J, Kunc F, Zeman H and Polakova H 2002 Sur. Coat. Technol. 154 304-13
29. Tsui T Y, Pharr G M, Oliver W C, Bhatia C S, White R L, Anders S, Anders A and Brown I G 1995 Mechanical behavior of diamond and other forms of carbon Mater. Res. Soc. Symp. Proc. 383 447
30. Li G and Xia L F 2001 Thin Solid Films 396 16-22