Synthesis and characterization of thin films of WCx produced by mixing W and C plasma streams

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 220-225

  Monteiro, Othon R ^a   Delplancke Ogletree, Marie Paule ^b   Lo, Roger Yu ^c   Winand, Rene ^b   Brown, Ian ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Diamondlike; Metal plasma; Plasma immersion; Tungsten carbide

Indexed keywords

ADHESION; AMORPHOUS FILMS; DEPOSITION; HARDNESS; MICROSTRUCTURE; PLASMA APPLICATIONS; RESIDUAL STRESSES; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS; TUNGSTEN CARBIDE;

FILTERED CATHODIC ARC DEPOSITION; PLASMA IMMERSION;

PROTECTIVE COATINGS;

EID: 0031250074     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00453-2     Document Type: Article

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