SCOPUS 정보 검색 플랫폼

Volumn 163-164, Issue , 2003, Pages 386-391

Effects of carbon incorporation in tungsten carbide films deposited by r.f. magnetron sputtering: Single layers and mutilayers

Author keywords

Hard coatings; Magnetron sputtering; Multilayers; PVD; Tungsten carbide; Wear

Indexed keywords

CARBON; MAGNETRON SPUTTERING; MULTILAYERS; SPUTTER DEPOSITION; STOICHIOMETRY; TUNGSTEN CARBIDE;

CRYSTALLOGRAPHIC ORIENTATIONS;

THIN FILMS;

CARBON; DEPOSITION; INORGANIC COATING; SPUTTERING; TUNGSTEN CARBIDE;

EID: 0037472739 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00635-7 Document Type: Article

Times cited : (40)

References (13)

1
- 0004066270
- (Ed.), Chapman and Hall, London
- W.A. Weimer (Ed.), Carbide, Nitride and Boride Materials-Synthesis and Processing, Chapman & Hall, London, 1997.
- (1997) Carbide, Nitride and Boride Materials-Synthesis and Processing
- Weimer, W.A.¹

2
- 0033883132
- H. Romanus, V. Cimalla, J.A. Schaefer, L. SpieΒ, G. Ecke, J. Pezoldt, Thin Solid Films 359 (2000) 146.
- (2000) Thin Solid Films , vol.359 , pp. 146
- Romanus, H.¹ Cimalla, V.² Schaefer, J.A.³ Spie, L.⁴ Ecke, G.⁵ Pezoldt, J.⁶

3
- 0023387980
- K. Fuchs, P. Rodhamer, E. Bertel, F.P. Netzer, E. Gornik, Thin Solid Films 151 (1987) 383-395.
- (1987) Thin Solid Films , vol.151 , pp. 383-395
- Fuchs, K.¹ Rodhamer, P.² Bertel, E.³ Netzer, F.P.⁴ Gornik, E.⁵

4
- 0027879272
- A. Ramalho, A. Cavaleiro, A.S. Miranda, M.T. Vieira, Surf. Coat. Technol. 62 (1993) 536-542.
- (1993) Surf. Coat. Technol. , vol.62 , pp. 536-542
- Ramalho, A.¹ Cavaleiro, A.² Miranda, A.S.³ Vieira, M.T.⁴

5
- 0021468825
- P.K. Srivastava, T.V. Rao, V.D. Vankar, K.L. Chopra, J. Vac. Sci. Technol. A 2 (3) (1984) 1261.
- (1984) Sci. Technol. A , vol.2 , Issue.3 , pp. 1261
- Srivastava, P.K.¹ Rao, T.V.² Vankar, V.D.³ Chopra, K.L.⁴ Vac., J.⁵

6
- 0024052690
- P.K. Srivastava, V.D. Vankar, K.L. Chopra, Thin Solid Films 161 (1988) 107.
- (1988) Thin Solid Films , vol.161 , pp. 107
- Srivastava, P.K.¹ Vankar, V.D.² Chopra, K.L.³

7
- 0000516760
- Y. Pauleau, Ph. Gouy-Pailler, S. Paidassi, Surf. Coat. Technol. 54/55 (1992) 324-328.
- (1992) Surf. Coat. Technol. , vol.54-55 , pp. 324-328
- Pauleau, Y.¹ Gouy-Pailler, Ph.² Paidassi, S.³

8
- 56949098460
- Ph. Gouy-Pailler, Y. Pauleau, J. Vac. Sci. Technol. A 11 (1993) 96.
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 96
- Gouy-Pailler, Ph.¹ Pauleau, Y.²

9
- 0026875935
- W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 (1992) 1564.
- (1992) J. Mater. Res. , vol.7 , pp. 1564
- Oliver, W.C.¹ Pharr, G.M.²

10
- 0026117658
- A. Cavaleiro, M.T. Vieira, G. Lemperiere, Thin Solid Films 197 (1991) 237-255.
- (1991) Thin Solid Films , vol.197 , pp. 237-255
- Cavaleiro, A.¹ Vieira, M.T.² Lemperiere, G.³

11
- 84957234468
- P.K. Srivastava, T.V. Rao, V.D. Vankar, K.L. Chopra, J. Vac. Sci. Technol. A 3 (1985) 2129.
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 2129
- Srivastava, P.K.¹ Rao, T.V.² Vankar, V.D.³ Chopra, K.L.⁴

12
- 0035803906
- C. Rincon, G. Zambrano, A. Carvajal, P. Prieto, H. Galindo, E. Martinez, A. Lousa, J. Esteve, Surf. Coat. Technol. 148 (2001) 277-283.
- (2001) Surf. Coat. Technol. , vol.148 , pp. 277-283
- Rincón, C.¹ Zambrano, G.² Carvajal, A.³ Prieto, P.⁴ Galindo, H.⁵ Martinez E. ⁶ Lousa, A.⁷ Esteve, J.⁸

13
- 0025386799
- P. Hendenqvist, M. Olsson, S. Jacobson, S. Soderberg, Surf. Coat. Technol. 41 (1990) 31.
- (1990) Surf. Coat. Technol. , vol.41 , pp. 31
- Hendenqvist, P.¹ Olsson, M.² Jacobson, S.³ Söderberg, S.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.