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Volumn 444, Issue 1-2, 2003, Pages 29-37

Magnetron sputtered W-C films with C60 as carbon source

Author keywords

C60; Carbides; Epitaxy; Tungsten

Indexed keywords

CARBON; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; TUNGSTEN COMPOUNDS;

EID: 0142118460     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00937-4     Document Type: Article
Times cited : (65)

References (28)
  • 5
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    • Part 1 (Regular Papers and Short Notes)
    • Arita M., Nishida I. Jpn. J. Appl. Phys. 32:1993;1759. Part 1 (Regular Papers and Short Notes).
    • (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 1759
    • Arita, M.1    Nishida, I.2
  • 14
    • 0029344868 scopus 로고
    • Part 1 (Regular Papers Short Notes)
    • Katoh M., Kawarada H. Jpn. J. Appl. Phys. 34:1995;3628. Part 1 (Regular Papers Short Notes).
    • (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 3628
    • Katoh, M.1    Kawarada, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.