Influence of ionic species on phase formation in ion mixing of carbon films on tungsten

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 171, Issue 4, 2000, Pages 465-469

  Wang, D Z ^a   Chen, J X ^a   Zhang, H L ^a   Huang, N K ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; ION BOMBARDMENT; IRRADIATION; MAGNETRON SPUTTERING; MICROANALYSIS; MIXING; NITROGEN; SPUTTER DEPOSITION; TUNGSTEN CARBIDE;

ION BEAM MIXING;

AMORPHOUS FILMS;

EID: 0034545520     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00307-4     Document Type: Article

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