The influence of chemical post-etching and UV irradiation on the optical absorption and thermal diffusivity of porous silicon studied by photoacoustic technique

Thin Solid Films

Volumn 499, Issue 1-2, 2006, Pages 161-167

  Shen, Qing ^a   Inoguchi, Masashi ^a   Toyoda, Taro ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

Optical absorption; Photoacoustic technique; Porous silicon; Thermal diffusivity; UV irradiation

Indexed keywords

ETCHING; IRRADIATION; LIGHT ABSORPTION; PHOTOACOUSTIC EFFECT; SILICON WAFERS; THERMAL DIFFUSION; ULTRAVIOLET RADIATION;

CHEMICAL POST-ETCHING; PHOTOACOUSTIC TECHNIQUE; THERMAL DIFFUSIVITY; UV IRRADIATION;

POROUS SILICON;

EID: 31544481870     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.037     Document Type: Conference Paper

References (31)

1. L.T. Canham Appl. Phys. Lett. 57 1990 1046
2. L.T. Canham, W.Y. Leong, M.I.J. Beale, T.I. Cox, and L. Taylor Appl. Phys. Lett. 61 1992 2563
3. D.J. Lockwood, A. Wang, and B. Bryskiewicz Solid State Commun. 89 1994 587
4. D.J. Lockwood Solid State Commun. 92 1994 101
5. H. Shinoda, T. Nakajima, K. Ueno, and N. Koshida Nature 400 1999 853
6. L.T. Canham Adv. Mater. 7 1995 1033
7. L.T. Canham, C.L. Reeves, A. Leni, M.R. Houlton, J.P. Newey, A.J. Simons, and T.I. Cox Thin Solid Films 297 1997 737
8. S.C. Bayliss, L.D. Buckberry, I. Fletcher, and M.J. Tobin Sens. Actuators, A, Phys. 74 1999 139
9. J.M. Martinez-Duart, and R.J. Martin-Palma Phys. Status Solidi, B Basic Res. 232 2002 81
10. G. Kaltsas, and A.G. Nassiopoulou Sens. Actuators, A, Phys. 76 1999 133
11. A.G. Nassiopoulou, and G. Kaltsas Phys. Status Solidi, A Appl. Res. 182 2000 307
12. A. Lysenko, S. Perichon, B. Remaki, and D. Barbier Sens. Actuators, A, Phys. 76 2002 13
13. C. Tsamis, A.G. assiopoulou, and A. Tserepi Sens. Actuators, B, Chem. 95 2003 78
14. A. Rosencwaig Phys. Today 28 1975 (September) 23
15. A. Rosencwaig Photoacoustic and Photoacoustic Spectroscopy 1980 Wiley Interscience New York 2
16. D.P. Almond Photothermal Science and Techniques 1996 Chapman & Hall 119
17. Q. Shen, and T. Toyoda Jpn. J. Appl. Phys. 39 2000 511
18. Q. Shen, and T. Toyoda Jpn. J. Appl. Phys. 39 2000 3146
19. T. Toyoda, T. Takahashi, and Q. Shen J. Appl. Phys. 88 2000 6444
20. M.D. Dramicanin, Z.D. Ristovski, P.M. Nikolic, D.G. Vasiljevic, and D.M. Todorovic Phys. Rev., B 51 1995 14226
21. Q. Shen, and T. Toyoda J. Therm. Anal. Calorim. 69 2002 1067
22. Q. Shen, and T. Toyoda Rev. Sci. Instrum. 74 2003 603
23. V. Lehmann, B. Jobst, T. Muschik, A. Kux, and V. Petrova-Koch Jpn. J. Appl. Phys. 32 1993 2095
24. A. Zunger, and S.B. Zhang Appl. Surf. Sci. 120 1996 350
25. D. Kovalev, G. Polisski, M. Ben-Chorin, J. Diener, and F. Koch J. Appl. Phys. 80 1996 5978
26. Q. Bisi, S. Ossicini, and L. Pavesi Surf. Sci. Rep. 38 2000 66
27. N. Koshida, H. Koyama, Y. Suda, Y. Yamamoto, M. Araki, T. Saito, and K. Sato Appl. Phys. Lett. 63 1993 2774
28. Q. Shen, and T. Toyoda T. Matsumoto T. Takizawa S. Shirakata T. Wada N. Yamamoto Ternary and Multinary Compounds in the 21st Century 2001 The Institute of Pure and Applied Physics Japan 256
29. S. Aouida, M. Saadoun, M.F. Boujmil, M. Ben Rabha, and B. Bessais Appl. Surf. Sci. 238 2004 193
30. D.N. Messias, A.R. Zanatta, and T. Catunda J. Non-Cryst. Solids 348 2004 230
31. D.P. Almond Photothermal Science and Techniques 1996 Chapman & Hall 17