Characterization of thermal properties of porous silicon film/silicon using photoacoustic technique

Journal of Thermal Analysis and Calorimetry

Volumn 69, Issue 3, 2002, Pages 1067-1073

  Shen, Q ^a   Toyoda, T ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

Carrier diffusion; Photoacoustic technique; Porosity; Porous silicon; Thermal diffusion; Thermal diffusivity

Indexed keywords

ELECTROCHEMISTRY; ETCHING; FILMS; LIGHT MODULATION; LIGHT TRANSMISSION; PHOTOACOUSTIC EFFECT; POROSITY; THERMAL DIFFUSION; THERMODYNAMIC PROPERTIES;

CARRIER DIFFUSION; ELECTROCHEMICAL ANODIC ETCHING; TRANSMISSION DETECTION CONFIGURATION;

POROUS SILICON;

EID: 0036400323     PISSN: 14182874     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1020661501961     Document Type: Article

References (11)

1. L. T. Canham, Appl. Phys. Lett., 57 (1990) 1046.
2. D. Kovalev, H. Heckler, G. Polisski and F. Koch, Phys. Stat. Sol. (b), 215 (1999) 871.
3. A. Rosencwaig, Phys. Today, 28 (1975) 23.
4. A. Rosencwaig, Photoacoustic and Photoacoustic Spectroscopy, Wiley, New York 1980, p. 1.
5. D. P. Almond, Photothermal Science and Techniques, Chapman & Hall 1996, p. 119.
6. T. Toyoda, T. Takahashi and Q. Shen, J. Appl. Phys., 88 (2000) 6444.
7. Q. Shen and T. Toyoda, Jpn. J. Appl. Phys., 39 (2000) 511.
8. Q. Shen and T. Toyoda, Jpn. J. Appl. Phys., 39 (2000) 3146.
9. T. Toyoda and S. Shimamoto, Jpn. J. Appl. Phys., 37 (1998) 2827.
10. M. D. Dramicanin, Z. D. Ristovski, P. M. Nikolic, D. G. Vasiljevic and D. M. Todorovic, Phys. Rev. B, 51 (1995) 14226.
11. I. Delgadillo, A. Cruz-Orea, H. Vargas, A. Calderon, J.-J. Alvarado-Grll and L. C. M. Miranda, Opt. Eng., 36 (1997) 343.