A surface micromachined tunable film bulk acoustic resonator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 166-173

  Pan, Wanling ^a,b   Soussan, Philippe ^b   Nauwelaers, Bart ^a   Tilmans, Harrie A C ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

FBAR; Frequency tuning; Integration; RF MEMS

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; ELECTRIC RESISTANCE; FABRICATION; INTEGRATION; MICROMACHINING; NATURAL FREQUENCIES; POLARIZATION;

FILM BULK ACOUSTIC RESONATORS (FBAR); FREQUENCY TUNING; INHOMOGENEITY; RF-MEMS;

RESONATORS;

EID: 8844272742     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.545532     Document Type: Conference Paper

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