Synthesis and characterization of self-catalyzed CuO nanorods on Cu/TaN/Si assembly using vacuum-arc Cu deposition and vapor-solid reaction

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 139-142

  Chen, U S ^a   Chueh, Y L ^a   Lai, S H ^a   Chou, L J ^a   Shih, Han C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CATALYSIS; COPPER OXIDES; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NANORODS; VAPOR-SOLID REACTION;

NANOSTRUCTURED MATERIALS;

EID: 31544468743     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2151215     Document Type: Article

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