Co Six thermal stability on narrow-width polysilicon resistors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 83-86

  Chen, Yen Ming ^a   Tu, George C ^a   Wang, Ying Lang ^b   Hwang, Gwo Jen ^b   Lo, Cheng Yao ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF TAINAN   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; ELECTRIC RESISTANCE; POLYSILICON; RESISTORS; SILICON COMPOUNDS;

DOPANT; POLYRESISTORS;

THERMODYNAMIC STABILITY;

EID: 31544433733     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2141626     Document Type: Article

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