SCOPUS 정보 검색 플랫폼

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1131-1134

Improved thermally stable surface and bulk passivation of PECVD SiN X:H using N2 and SiH4

(7) Weeber, A W a Rieffe, H C a Goris, M J A A a Hong, J a,b Kessels, W M M b Van De Banden, M C M b Soppe, W J a

a TNO (Netherlands)

b EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EMITTERS; GAS MIXTURES; SPECTRAL RESPONSE; SURFACE PASSIVATION;

COMPOSITION EFFECTS; CURRENT VOLTAGE CHARACTERISTICS; GASES; NITROGEN; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE PROPERTIES; THERMODYNAMIC STABILITY;

SILICON NITRIDE;

EID: 3142771634 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (5)

References (12)

1
- 0036747868
- W.M.M. Kessels, J. Hong, F.J.H van Assceh, J.D. Moschner, T. Lauinger, W.J. Soppe, A.W. Weeber, M.C.M. van de Sanden., J. Vac. Sci. Technol A 20 (2002) 1704.
- (2002) J. Vac. Sci. Technol A , vol.20 , pp. 1704
- Kessels, W.M.M.¹ Hong, J.² Van Assceh, F.J.H.³ Moschner, J.D.⁴ Lauinger, T.⁵ Soppe, W.J.⁶ Weeber, A.W.⁷ Van De Sanden, M.C.M.⁸

2
- 0037343281
- J. Hong, W.M.M. Kessels, F.J.H. van Assche, H.C. Riefle, W.J. Soppe, A.W. Weeber, M.C.M. van de Sanden, Prog. Photovolt. 11 (2003) 125.
- (2003) Prog. Photovolt. , vol.11 , pp. 125
- Hong, J.¹ Kessels, W.M.M.² Van Assche, F.J.H.³ Riefle, H.C.⁴ Soppe, W.J.⁵ Weeber, A.W.⁶ Van De Sanden, M.C.M.⁷

3
- 6344257397
- New Orleans 20-24 May
- J. Hong, W.M.M. Kessels, F.J.H. van Assche, H.C. Rieffe, W.J. Soppe, A.W. Weeber, M.C.M. van de Sanden, Proceedings 29th IEEE PVSC, New Orleans 20-24 May 2002, 154.
- (2002) Proceedings 29th IEEE PVSC , pp. 154
- Hong, J.¹ Kessels, W.M.M.² Van Assche, F.J.H.³ Rieffe, H.C.⁴ Soppe, W.J.⁵ Weeber, A.W.⁶ Van De Sanden, M.C.M.⁷

4
- 6344286369
- Europe Rome 7-10 October in press
- H.C. Rieffe, W.J. Soppe, J. Hong, W.M.M. Kessels, M.C.M. van de Sanden, Proceedings PV in Europe Rome 7-10 October 2002, in press.
- (2002) Proceedings PV
- Rieffe, H.C.¹ Soppe, W.J.² Hong, J.³ Kessels, W.M.M.⁴ Van De Sanden, M.C.M.⁵

5
- 84861435358
- H. Mäckel and R. Lüdeman, J. Appl. Phys. 92 (2002) 2602.
- (2002) J. Appl. Phys. , vol.92 , pp. 2602
- Mäckel, H.¹ Lüdeman, R.²

6
- 0035199111
- J. Schmidt and M. Kerr, Sol. Energy Mat. Sol. Cells 65 (2001) 585.
- (2001) Sol. Energy Mat. Sol. Cells , vol.65 , pp. 585
- Schmidt, J.¹ Kerr, M.²

7
- 0002470573
- Glasgow 1-5 May
- W.J. Soppe, B.G. Duijvelaar, S.E.A. Schiermeier, A.W. Weeber, A. Steiner, F.M. Schuurmans, Proceedings 16th EPVSEC, Glasgow 1-5 May 2000 1420.
- (2000) Proceedings 16th EPVSEC , pp. 1420
- Soppe, W.J.¹ Duijvelaar, B.G.² Schiermeier, S.E.A.³ Weeber, A.W.⁴ Steiner, A.⁵ Schuurmans, F.M.⁶

8
- 0000513411
- R.A. Sinton and A. Cuevas, Appl. Phys. Lett. 69 (1996) 2510.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2510
- Sinton, R.A.¹ Cuevas, A.²

9
- 0031249442
- P. Doshi, G.E. Jellison, A. Rohatgi, J. Appl. Optics 36 (1997) 7826.
- (1997) J. Appl. Optics , vol.36 , pp. 7826
- Doshi, P.¹ Jellison, G.E.² Rohatgi, A.³

10
- 6344223905
- 20-24 May New Orleans
- W.J. Soppe, J. Hong, W.M.M. Kessels, M.C.M. van de Sanden, H. Schlemm, C. Devilee, S.E.A. Schiermeier, J.H. Bultman, A.W. Weeber, Proceedings 29th IEEE PVSC 20-24 May 2002 New Orleans, 1558.
- (2002) Proceedings 29th IEEE PVSC , pp. 1558
- Soppe, W.J.¹ Hong, J.² Kessels, W.M.M.³ Van De Sanden, M.C.M.⁴ Schlemm, H.⁵ Devilee, C.⁶ Schiermeier, S.E.A.⁷ Bultman, J.H.⁸ Weeber, A.W.⁹

11
- 6344228977
- to be published
- W.J. Soppe, H.C. Rieffe, A.W. Weeber, to be published.
- Soppe, W.J.¹ Rieffe, H.C.² Weeber, A.W.³

12
- 0035194556
- B. Lenkeit, S. Steckemetz, F.Artuso, R. Hezel, Sol. Energy Mater. & Sol. Cells 65 (2001) 317.
- (2001) Sol. Energy Mater. & Sol. Cells , vol.65 , pp. 317
- Lenkeit, B.¹ Steckemetz, S.² Artuso, F.³ Hezel, R.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.