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Volumn 84, Issue 25, 2004, Pages 5219-5221
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Ion implant dose dependence of photocarrier radiometry at multiple excitation wavelengths
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION;
ANNEALING;
BANDWIDTH;
CRYSTAL ORIENTATION;
ELECTRIC EXCITATION;
FREQUENCY MODULATION;
HARMONIC GENERATION;
INFRARED RADIATION;
ION BEAMS;
ION IMPLANTATION;
LATTICE CONSTANTS;
REFRACTIVE INDEX;
SILICON WAFERS;
EXCITATION WAVELENGTHS;
PHOTOCARRIER RADIOMETRY (PCR);
PHOTOGENERATION VOLUME;
PHOTOTHERMAL SIGNALS;
RADIOMETRY;
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EID: 3142717398
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1765737 Document Type: Article |
Times cited : (29)
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References (21)
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