메뉴 건너뛰기




Volumn 117, Issue 4, 1996, Pages 367-374

Multi-wavelength Raman probing of phosphorus implanted silicon wafers

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CORRELATION METHODS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL LATTICES; PHOSPHORUS; RAMAN SPECTROSCOPY; SILICON WAFERS; THERMAL EFFECTS;

EID: 0030270448     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00304-7     Document Type: Article
Times cited : (3)

References (18)
  • 13
    • 0000865323 scopus 로고
    • M.H. Brodsky, R.S. Title, K. Weiser and G.D. Pettit, Phys. Rev. B 1 (1970) 2632; L. Crowder, R.S. Title, M.H. Brodsky and G.D. Pettit, Appl. Phys. Lett. 16 (1970) 205; Lubbert and B.C. Burkey, J. Appl. Phys. 55 (1984) 760.
    • (1970) Phys. Rev. B , vol.1 , pp. 2632
    • Brodsky, M.H.1    Title, R.S.2    Weiser, K.3    Pettit, G.D.4
  • 14
    • 0014745847 scopus 로고
    • M.H. Brodsky, R.S. Title, K. Weiser and G.D. Pettit, Phys. Rev. B 1 (1970) 2632; L. Crowder, R.S. Title, M.H. Brodsky and G.D. Pettit, Appl. Phys. Lett. 16 (1970) 205; Lubbert and B.C. Burkey, J. Appl. Phys. 55 (1984) 760.
    • (1970) Appl. Phys. Lett. , vol.16 , pp. 205
    • Crowder, L.1    Title, R.S.2    Brodsky, M.H.3    Pettit, G.D.4
  • 15
    • 0021372907 scopus 로고
    • M.H. Brodsky, R.S. Title, K. Weiser and G.D. Pettit, Phys. Rev. B 1 (1970) 2632; L. Crowder, R.S. Title, M.H. Brodsky and G.D. Pettit, Appl. Phys. Lett. 16 (1970) 205; Lubbert and B.C. Burkey, J. Appl. Phys. 55 (1984) 760.
    • (1984) J. Appl. Phys. , vol.55 , pp. 760
    • Lubbert1    Burkey, B.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.