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Volumn 117, Issue 4, 1996, Pages 367-374
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Multi-wavelength Raman probing of phosphorus implanted silicon wafers
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHIZATION;
CORRELATION METHODS;
CRYSTAL ATOMIC STRUCTURE;
CRYSTAL LATTICES;
PHOSPHORUS;
RAMAN SPECTROSCOPY;
SILICON WAFERS;
THERMAL EFFECTS;
IMPLANTATION ENERGIES;
ION IMPLANTATION;
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EID: 0030270448
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/0168-583X(96)00304-7 Document Type: Article |
Times cited : (3)
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References (18)
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