|
Volumn 74, Issue 1 II, 2003, Pages 545-549
|
Dynamics of the plasma and thermal waves in surface-modified semiconductors (invited)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
COMPUTER SIMULATION;
ION IMPLANTATION;
MULTILAYERS;
SURFACE TREATMENT;
PHOTOMODULATED REFLECTANCE (PMR);
SEMICONDUCTING SILICON;
|
EID: 0037283443
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1517154 Document Type: Conference Paper |
Times cited : (16)
|
References (16)
|