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Volumn 74, Issue 1 II, 2003, Pages 545-549

Dynamics of the plasma and thermal waves in surface-modified semiconductors (invited)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; ION IMPLANTATION; MULTILAYERS; SURFACE TREATMENT;

EID: 0037283443     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1517154     Document Type: Conference Paper
Times cited : (16)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.