Notice of Removal: Ka-band distributed MEMS phase shifters on silicon using AlSi suspended membrane

Journal of Microelectromechanical Systems

Volumn 13, Issue 3, 2004, Pages 542-549

  Qing, Jian ^a   Shi, Yanling ^a   Li, Wei ^a   Lai, Zongsheng ^a   Zhu, Ziqiang ^a   Xin, Peisheng ^a  

^a EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CAPACITORS; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING; SUBSTRATES; TRANSMISSION LINE THEORY;

ACTUATION VOLTAGE; BRIDGE CAPACITORS; MICROELECTROMECHANICAL SYSTEMS; RETURN LOSS; STRUCTURAL PARAMETERS;

PHASE SHIFTERS;

EID: 3142710834     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.828734     Document Type: TB

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