Distributed MEMS phase shifters on silicon using tapered impedance unit cells

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2002, Pages 1237-1240

  Lakshminarayanan, B ^a   Weller, T ^a  

^a University of South Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; ELECTRIC IMPEDANCE; INSERTION LOSSES; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; PHASE SHIFT; PHOTORESISTS; SEMICONDUCTING SILICON; SUBSTRATES; TRANSMISSION LINE THEORY; WAVEGUIDE COMPONENTS;

DISTRIBUTED TRANSMISSION LINE; RETURN LOSS; TAPERED IMPEDANCE TRANSMISSION LINE;

PHASE SHIFTERS;

EID: 0036066107     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Distributed true-time delay phase shifters and wide-band switches
2. Low-loss cascadable MEMS distributed X-band phase shifters
3. Low-loss distributed MEMS phase shifters
4. K-band 3-bit low-loss distributed MEMS phase shifter