Joint interferometric measurement of planarity and parallelism

Optical Engineering

Volumn 43, Issue 5, 2004, Pages 1215-1220

  Vannoni, Maurizio ^a   Molesini, Giuseppe ^a  

^a SPIE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CAMERAS; CHARGE COUPLED DEVICES; DATA REDUCTION; INTERFEROMETERS; LASER BEAMS; MICROMETERS; OPTICAL TESTING; PRISMS; REFRACTIVE INDEX;

CAVITY CALIBRATION; JOINT INTERFEROMETRIC MEASUREMENT; PLANE PARALLEL PLATES; PROBE BEAM; PROGRAMMABLE INTERFEROMETER;

INTERFEROMETRY;

EID: 3142699347     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1689334     Document Type: Article

References (10)

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