Paired interferometric measurement of planarity and parallelism

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 864-871

  Vannoni, M ^a   Molesini, G ^a  

^a ISTITUTO NAZIONALE DI OTTICA   (Italy)

Author keywords

Interferometry; Optical metrology; Parallelism; Planarity

Indexed keywords

ERRORS; INTERFEROMETERS; LASER APPLICATIONS; LIGHT REFLECTION; LIGHT SOURCES; OPTICAL GLASS; PRISMS; REFRACTIVE INDEX; STANDARDS; WAVEFRONTS;

OPTICAL METROLOGY; PARALLELISM; PLANARITY;

INTERFEROMETRY;

EID: 0141496975     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.501263     Document Type: Conference Paper

References (10)

1. J. E. Decker and N. Brown, Recent developments in optical gauge block metrology, vol. 3477 of Proc. SPIE, 1998.
2. J. E. Decker and N. Brown, Recent developments in traceable dimensional measurements, vol. 4401 of Proc. SPIE, 2001.
3. B.G. Vaucher, T. Thalmann, and H. Baechler, "European comparison of short gaugeblock measurement by interferometry," Metrologia 32, pp. 79-86, 1995.
4. N. Brown, T.B. Eom, E. Howick, O. Kruger, L. Lan, S.L. Ling-Tan, H. Matsumoto, J. Pusaka, R.R. Singhal, and Y. Xu, "Asian-pacific metrology programme of gauge blocks comparison," Metrologia 33, pp. 61-66, 1996.
5. H. Darnedded and J. Helmcke, "European comparison of long gauge blocks," Metrologia 33, pp. 485-491, 1996.
6. H. Darnedde, "High precision calibration of long gauge blocks using the vacuum wavelength comparator", Metrologia 29, pp. 349-359, 1992.
7. V. Greco, F. Marchesini, and G. Molesini, "Interferometric testing of optical parallels", J. Opt. A: Pure Appl. Opt. 1, pp. 741-745, 1999.
8. P. de Groot, J. Biegen, J. Clark, X. C. de Lega, and D. Grigg, "Optical interferometry for measurement of the geometric dimensions of industrial parts," Applied Optics 41, pp. 3853-3860, 2002.
9. B. Fritz, "Absolute calibration of an optical flat," Opt. Eng. 23, pp. 379-383, 1984.
10. V. Greco, R. Tronconi, C. D. Vecchio, M. Trivi, and G. Molesini, "Absolute measurement of planarity with fritz's method: uncertainty evaluation," Applied Optics 38, pp. 2018-2027, 1999.