Optical interferometry for measurement of the geometric dimensions of industrial parts

Applied Optics

Volumn 41, Issue 19, 2002, Pages 3853-3860

  Groot, Peter De ^a   Biegen, Jim ^a   Clark, Jack ^a   De Lega, Xavier Colonna ^a   Grigg, David ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISKS (MACHINE COMPONENTS); HETERODYNING; INFRARED DEVICES; LASERS; LIGHT INTERFERENCE; OPTICAL RADAR; OPTICAL SYSTEMS;

INTEGRATED ZEROING SYSTEMS;

INTERFEROMETRY;

EID: 0036641702     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.003853     Document Type: Article

References (13)

1. X. Colonna de Lega, P. de Groot, and D. Grigg, “Dimensional measurement of engineered parts by combining surface profiling with displacement measuring interferometry,” in Proceedings of Fringe 2001: the Fourth International Workshop on Automated Processing of Fringe Patterns, W. Osten and W. Juptner, eds. (Elsevier, Paris, 2001), pp. 47-55.
2. American Society of Mechanical Engineers, ASME Y14.5M-1994: Dimensioning and Tolerancing (ASME, New York, 1994).
3. D. C. Barnes and M. J. Puttock, “National Physics Laboratory interferometer,” Engineer 196, 763-769 (1953).
4. D. Malacara, Optical Shop Testing, 2nd ed. (Wiley, New York, 1992), pp. 76, 259-260.
5. K. Patorski and M. Kujawinska, Handbook of the Moire Fringe Technique (Elsevier, Amsterdam, 1993).
6. P. de Groot, “Three-color laser-diode interferometer,” Appl. Opt. 30, 3612-3616 (1991).
7. P. de Groot, X. Colonna de Lega, and D. Stephenson, “Geometrically desensitized interferometry for shape measurement of flat surfaces and 3D structures,” Opt. Eng. 39, 86-90 (2000).
8. T. Dresel, G. Haeusler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992).
9. G. Hausler, “About the scaling behavior of optical range sensors” in Fringe’97: Automatic Processing of Fringe Patterns, W. Juptner and W. Osten, eds., Akademic Verlag Series in Optical Metrology (Akademic Verlag, Bremen, Germany, 1997), pp. 147-155.
10. C. Ai, “IR interferometers using modern cameras,” in Optical Manufacturing and Testing II, H. Stahl, ed., Proc. SPIE 3134, 461-464 (1997).
11. C. R. Munnerlyn and M. Latta, “Rough surface interferometry using a CO2 laser source,” Appl. Opt. 7, 1858-1859 (1968).
12. X. Colonna de Lega, L. Deck, and P. de Groot, “Method and apparatus for the metrology of precision engineered components,” U.S. patent 6,195,168 B1 (27 February 2001).
13. P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389-401 (1995)