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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 5 A, 2004, Pages 2640-2644

Preparation of amorphous hydrogenated carbon films by RF sputtering at a low-hydrogen-flow-rate region for hydrogen-reactive substrates

(5) Oshiro, Takehiko a Yamazato, Masaaki a Higa, Akira a Maehama, Takehiro a Toguchi, Minoru a

a UNIVERSITY OF THE RYUKYUS (Japan)

Author keywords

Amorphous hydrogenated carbon film; Bonding hydrogen concentration; CdTe; Hydrogen reactive substrate; Low hydrogen flow rate; Optical gap; Protective film; RF magnetron sputtering

Indexed keywords

ETCHING; HYDROGEN; HYDROGENATION; MAGNETRON SPUTTERING; REDUCTION; RESIDUAL STRESSES;

AMORPHOUS HYDROGENATED CARBON FILMS; HYDROGEN REACTIVE SUBSTRATES; LOW HYDROGEN FLOW RATE; OPTICAL GAP;

AMORPHOUS FILMS;

EID: 3142662002 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.2640 Document Type: Article

Times cited : (8)

References (14)

1
- 0034047172
- M. K. Fung, K. H. Lai, H. L. Lai, C. Y. Chan, N. B. Wong, I. Bello, C. S. Lee and S. T. Lee: Diam. Relat. Mater. 9 (2000) 815.
- (2000) Diam. Relat. Mater. , vol.9 , pp. 815
- Fung, M.K.¹ Lai, K.H.² Lai, H.L.³ Chan, C.Y.⁴ Wong, N.B.⁵ Bello, I.⁶ Lee, C.S.⁷ Lee, S.T.⁸

2
- 0032614255
- A. Grill: Diam. Relat. Mater. 8 (1999) 428.
- (1999) Diam. Relat. Mater. , vol.8 , pp. 428
- Grill, A.¹

3
- 0035248170
- A. Grill: Diam. Relat. Mater. 10 (2001) 234.
- (2001) Diam. Relat. Mater. , vol.10 , pp. 234
- Grill, A.¹

4
- 0001047883
- P. W. May, S. Hohn, W. N. Wang and N. A. Fox: Appl. Phys. Lett. 72 (1998) 2182.
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2182
- May, P.W.¹ Hohn, S.² Wang, W.N.³ Fox, N.A.⁴

5
- 0001004510
- B. Popescu, C. Verney, E. A. Davis, V. Paret and A. Brunet-Bruneau: J. Non-Cryst. Solids 266-269 (2000) 778.
- (2000) J. Non-cryst. Solids , vol.266-269 , pp. 778
- Popescu, B.¹ Verney, C.² Davis, E.A.³ Paret, V.⁴ Brunet-Bruneau, A.⁵

6
- 0036531820
- G. Fanchini, A. Tagliaferro, B. Popescu and E. A. Davis: J. Non-Cryst. Solids 299-302 (2002) 846.
- (2002) J. Non-cryst. Solids , vol.299-302 , pp. 846
- Fanchini, G.¹ Tagliaferro, A.² Popescu, B.³ Davis, E.A.⁴

7
- 18844466597
- M. L. Wu, K. Howard, K. Grannen, J. Gui, G. C. Rach and P. J. Sides: Thin Solid Films 377-378 (2000) 249.
- (2000) Thin Solid Films , vol.377-378 , pp. 249
- Wu, M.L.¹ Howard, K.² Grannen, K.³ Gui, J.⁴ Rach, G.C.⁵ Sides, P.J.⁶

8
- 0035247759
- J. Robertson: Thin Solid Films 383 (2001) 81.
- (2001) Thin Solid Films , vol.383 , pp. 81
- Robertson, J.¹

9
- 0037508722
- G. Fanchini, S. C. Ray, A. Tagliaferro, V. M. Tiainen and T. Sajavaara: Diam. Relat. Mater. 12 (2003) 900.
- (2003) Diam. Relat. Mater. , vol.12 , pp. 900
- Fanchini, G.¹ Ray, S.C.² Tagliaferro, A.³ Tiainen, V.M.⁴ Sajavaara, T.⁵

10
- 0015920825
- L. Rimai, M. E. Heyde and D. Gill: J. Am. Chem. Soc. 95 (1973) 4493.
- (1973) J. Am. Chem. Soc. , vol.95 , pp. 4493
- Rimai, L.¹ Heyde, M.E.² Gill, D.³

11
- 0242603790
- A. C. Ferrari and J. Robertson: Phys. Rev. B 61 (2000) 14095.
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

12
- 0001173171
- J. D. Carey, R. D. Forrest, R. U. A. Khan and S. R. P. Silva: Appl. Phys. Lett. 77 (2000) 2006.
- (2000) Appl. Phys. Lett. , vol.77 , pp. 2006
- Carey, J.D.¹ Forrest, R.D.² Khan, R.U.A.³ Silva, S.R.P.⁴

13
- 0035248653
- R. C. Barklie: Diam. Relat. Mater. 10 (2001) 174.
- (2001) Diam. Relat. Mater. , vol.10 , pp. 174
- Barklie, R.C.¹

14
- 30244535151
- J. Robertson and E. P. O'Reilly: Phys. Rev. B 35 (1987) 2946.
- (1987) Phys. Rev. B , vol.35 , pp. 2946
- Robertson, J.¹ O'Reilly, E.P.²

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