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Volumn 95, Issue 12, 2004, Pages 7850-7855

Submicron-scale characterization of poly-Si thin films crystallized by excimer laser and continuous-wave laser

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL BONDS; CONTINUOUS WAVE LASERS; CRYSTALLIZATION; ELECTROLUMINESCENCE; EXCIMER LASERS; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; HYDROGENATION; LASER BEAM EFFECTS; OPTICAL MICROSCOPY; PHONONS; RAMAN SPECTROSCOPY; SOLIDIFICATION; STRESS ANALYSIS; THIN FILM TRANSISTORS;

EID: 3142537356     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1751635     Document Type: Article
Times cited : (23)

References (20)
  • 14
    • 3142606651 scopus 로고    scopus 로고
    • edited by S. Nagakura et al. Iwanami, Tokyo, (in Japanese)
    • Scientific Dictionary, 5th ed., edited by S. Nagakura et al. (Iwanami, Tokyo, 1998), p. 1221 (in Japanese).
    • (1998) Scientific Dictionary, 5th Ed. , pp. 1221


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.