|
Volumn 95, Issue 12, 2004, Pages 7850-7855
|
Submicron-scale characterization of poly-Si thin films crystallized by excimer laser and continuous-wave laser
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
CHEMICAL BONDS;
CONTINUOUS WAVE LASERS;
CRYSTALLIZATION;
ELECTROLUMINESCENCE;
EXCIMER LASERS;
GRAIN BOUNDARIES;
GRAIN SIZE AND SHAPE;
HYDROGENATION;
LASER BEAM EFFECTS;
OPTICAL MICROSCOPY;
PHONONS;
RAMAN SPECTROSCOPY;
SOLIDIFICATION;
STRESS ANALYSIS;
THIN FILM TRANSISTORS;
EXCIMER LASER ANNEALING (ELA);
LOCAL-VIBRATION MODES (LVM);
OPTICAL-PHONONS;
SUPER-LATERAL GROWTH (SLG);
POLYSILICON;
|
EID: 3142537356
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1751635 Document Type: Article |
Times cited : (23)
|
References (20)
|